Based on Contributions Revised from the Technical Digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-98)

Based on Contributions Revised from the Technical Digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-98)
Author: International Workshop on Micro-Electro-Mechanical Systems. 11, 1998, Heidelberg
Publisher:
Total Pages: 191
Release: 1999
Genre:
ISBN:

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Based on Contributions Revised from the Technical Digest of the Eleventh IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-98)
Language: en
Pages: 191
Authors: International Workshop on Micro-Electro-Mechanical Systems. 11, 1998, Heidelberg
Categories:
Type: BOOK - Published: 1999 - Publisher:

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Special Double Issue of the Micromechanics Section of Sensors and Actuators
Language: en
Pages: 192
Authors: C. H. Mastrangelo
Categories:
Type: BOOK - Published: 1999 - Publisher:

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Micromechanics
Language: en
Pages:
Authors:
Categories:
Type: BOOK - Published: 1999 - Publisher:

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Based on Contributions Revised from the Technical Digest of the Twelfth IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99)
Language: en
Pages: 6
Authors: International Conference on Micro-Electro-Mechanical Systems. 12, 1999, Orlando, Fla..
Categories:
Type: BOOK - Published: 2000 - Publisher:

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Special Issue Based Upon Contributions Revised from the Technical Digest of the 21st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2008
Language: en
Pages: 135
Authors: International Conference on Micro-Electro-Mechanical Systems
Categories:
Type: BOOK - Published: 2009 - Publisher:

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