Semiconductor Wafer Bonding 9: Science, Technology, and Applications

Semiconductor Wafer Bonding 9: Science, Technology, and Applications
Author: Helmut Baumgart
Publisher: The Electrochemical Society
Total Pages: 398
Release: 2006
Genre: Microelectromechanical systems
ISBN: 156677506X

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This issue of ECS Transactions covers state-of-the-art R&D results of the last 1.5 years in the field of semiconductor wafer bonding technology. Wafer Bonding Technology can be used to create novel composite materials systems and devices what would otherwise be unattainable. Wafer bonding today is rapidly expanding applications in such diverse fields as photonics, sensors, MEMS, X-ray optics, non-electronic microstructures, high performance CMOS platforms for high end servers, Si-Ge, strained SOI, Germanium-on-Insulator (GeOI), and Nanotechnologies.


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Semiconductor Wafer Bonding 9: Science, Technology, and Applications
Language: en
Pages: 398
Authors: Helmut Baumgart
Categories: Microelectromechanical systems
Type: BOOK - Published: 2006 - Publisher: The Electrochemical Society

GET EBOOK

This issue of ECS Transactions covers state-of-the-art R&D results of the last 1.5 years in the field of semiconductor wafer bonding technology. Wafer Bonding T