Copper Interconnects New Contact Metallurgies Structures And Low K Interlevel Dielectrics
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Copper Interconnects, New Contact Metallurgies/structures, and Low-k Interlevel Dielectrics
| Author | : G. S. Mathad |
| Publisher | : The Electrochemical Society |
| Total Pages | : 262 |
| Release | : 2001 |
| Genre | : Science |
| ISBN | : 9781566772945 |
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