Development Of Polycrystalline And Amorphous Sic Thin Films For Membrane Based Mems Devices
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Development of Polycrystalline and Amorphous SiC Thin Films for Membrane-based MEMS Devices
Author | : Jiangang Du |
Publisher | : |
Total Pages | : 622 |
Release | : 2007 |
Genre | : |
ISBN | : |
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