Development of Polycrystalline and Amorphous SiC Thin Films for Membrane-based MEMS Devices

Development of Polycrystalline and Amorphous SiC Thin Films for Membrane-based MEMS Devices
Author: Jiangang Du
Publisher:
Total Pages: 622
Release: 2007
Genre:
ISBN:

Download Development of Polycrystalline and Amorphous SiC Thin Films for Membrane-based MEMS Devices Book in PDF, Epub and Kindle


Development of Polycrystalline and Amorphous SiC Thin Films for Membrane-based MEMS Devices
Language: en
Pages: 622
Authors: Jiangang Du
Categories:
Type: BOOK - Published: 2007 - Publisher:

GET EBOOK

Research & Technology 2001
Language: en
Pages: 251
Authors:
Categories:
Type: BOOK - Published: - Publisher: DIANE Publishing

GET EBOOK

Polycrystalline And Amorphous Thin Films And Devices
Language: en
Pages: 321
Authors: Lawrence Kazmerski
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-02 - Publisher: Elsevier

GET EBOOK

Polycrystalline and Amorphous Thin Films and Devices is a compilation of papers that discusses the electronic, optical, and physical properties of thin material
Amorphous and Polycrystalline Thin-film Silicon Science and Technology
Language: en
Pages:
Authors: A. Flewitt
Categories:
Type: BOOK - Published: 2009 - Publisher:

GET EBOOK

SiC Thin Films on Insulating Substrates for Robust Microelectromechanical System (MEMS) Applications
Language: en
Pages: 170
Authors:
Categories:
Type: BOOK - Published: 2003 - Publisher:

GET EBOOK

An increasing demand for robust MEMS devices, such as micro-sensors, that can operate at temperatures well above 300 deg C and often in severe environments has