Electrical Atomic Force Microscopy For Nanoelectronics
Download Electrical Atomic Force Microscopy For Nanoelectronics full books in PDF, epub, and Kindle. Read online free Electrical Atomic Force Microscopy For Nanoelectronics ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Electrical Atomic Force Microscopy for Nanoelectronics
Author | : Umberto Celano |
Publisher | : Springer |
Total Pages | : 408 |
Release | : 2019-08-01 |
Genre | : Science |
ISBN | : 3030156125 |
Download Electrical Atomic Force Microscopy for Nanoelectronics Book in PDF, Epub and Kindle
The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.
Electrical Atomic Force Microscopy for Nanoelectronics Related Books
Pages: 408
Pages: 1002
Pages: 497
Pages: 277
Pages: 256