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This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. It details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.
This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the Universit
Traditional macro-optics can be designed without complex design software tools. However, digital optics, especially wafer-scale micro-optics, require specific s
Linear systems is a broad and important area in many scientific and engineering disciplines, and it is especially important in optics because it forms the basis
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p
"The Field Guide to Solar Optics attempts to consolidate and summarize optical topics in solar technologies and engineering that are dispersed throughout litera
