Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
Author: Eric Garfunkel
Publisher: Springer Science & Business Media
Total Pages: 503
Release: 2012-12-06
Genre: Technology & Engineering
ISBN: 9401150087
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An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.


Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
Language: en
Pages: 503

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Authors: Eric Garfunkel
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers
Defects in SiO2 and Related Dielectrics: Science and Technology
Language: en
Pages: 619

Defects in SiO2 and Related Dielectrics: Science and Technology

Authors: Gianfranco Pacchioni
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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Silicon dioxide plays a central role in most contemporary electronic and photonic technologies, from fiber optics for communications and medical applications to
Fundamental Aspects of Silicon Oxidation
Language: en
Pages: 269

Fundamental Aspects of Silicon Oxidation

Authors: Yves J. Chabal
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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Discusses silicon oxidation in a tutorial fashion from both experimental and theoretical viewpoints. The authors report on the state of the art both at Lucent T
Silicon Materials Science and Technology X
Language: en
Pages: 599

Silicon Materials Science and Technology X

Authors: Howard R. Huff
Categories: Semiconductors
Type: BOOK - Published: 2006 - Publisher: The Electrochemical Society

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This was the tenth symposium of the International Symposium on Silcon Material Science and Technology, going back to 1969. This issue provides a unique historic
Handbook of Silicon Semiconductor Metrology
Language: en
Pages: 703

Handbook of Silicon Semiconductor Metrology

Authors: Alain C. Diebold
Categories: Technology & Engineering
Type: BOOK - Published: 2001-06-29 - Publisher: CRC Press

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-l