Gaseous Electronics Conference Radio-Frequency Reference Cell

Gaseous Electronics Conference Radio-Frequency Reference Cell
Author: James K. Olthoff
Publisher: DIANE Publishing
Total Pages: 181
Release: 1996
Genre:
ISBN: 078812708X

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The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, investigation of industrial-type plasmas, and theoretical modeling. This report contains 12 articles that review nearly all of the experiments and theoretical modeling efforts that have been performed over the last 5 years using GEC cells. Together, they serve as a "users' guide" to the operation and performance of the GEC cell.


Gaseous Electronics Conference Radio-Frequency Reference Cell
Language: en
Pages: 181
Authors: James K. Olthoff
Categories:
Type: BOOK - Published: 1996 - Publisher: DIANE Publishing

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The GEC RF Reference Cell is a parallel plate, capacity-coupled, rf plasma reactor that, in principle, is suitable for studies of basic discharge phenomena, inv
The Gaseous Electronics Conference RF Reference Cell
Language: en
Pages: 194
Authors: Gaseous Electronics Conference. 48, 1995, Berkeley, Calif..
Categories:
Type: BOOK - Published: 1995 - Publisher:

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Special Issue
Language: en
Pages: 194
Authors:
Categories: Electronics
Type: BOOK - Published: 1995 - Publisher:

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Journal of Research of the National Institute of Standards and Technology
Language: en
Pages: 842
Authors:
Categories: Chemistry
Type: BOOK - Published: 1995 - Publisher:

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Reports NIST research and development in the physical and engineering sciences in which the Institute is active. These include physics, chemistry, engineering,
Publications of the National Institute of Standards and Technology ... Catalog
Language: en
Pages: 1162
Authors: National Institute of Standards and Technology (U.S.)
Categories:
Type: BOOK - Published: 1994 - Publisher:

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