Gettering And Defect Engineering In Semiconductor Technology
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Gettering and Defect Engineering in Semiconductor Technology
Author | : Hermann G. Grimmeiss |
Publisher | : Trans Tech Publications Ltd |
Total Pages | : 650 |
Release | : 1993-12-12 |
Genre | : Technology & Engineering |
ISBN | : 3035706506 |
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Solid State Phenomena Vols. 32-33
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Language: en
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Type: BOOK - Published: 1993-12-12 - Publisher: Trans Tech Publications Ltd
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Volume is indexed by Thomson Reuters CPCI-S (WoS). This volume is a collection of papers presented at the 10th International Autumn Meeting on "Gettering and De
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Volume is indexed by Thomson Reuters CPCI-S (WoS). This collection comprises 117 peerreviewed papers invited from over 70 research institutions in more than 25
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Defect control relies more and more upon advanced fabrication approaches such as the use of slow pulling rates and hydrogen annealing. Gettering techniques rema