Handbook Of Plasma Processing Technology
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Handbook of Plasma Processing Technology
| Author | : Stephen M. Rossnagel |
| Publisher | : William Andrew |
| Total Pages | : 523 |
| Release | : 1990 |
| Genre | : Reference |
| ISBN | : 9780815512202 |
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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
Handbook of Plasma Processing Technology Related Books
Language: en
Pages: 523
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Type: BOOK - Published: 1990 - Publisher: William Andrew
This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.
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Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.
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Pages: 523
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This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposit
Language: en
Pages: 88
Pages: 88
Type: BOOK - Published: 1991-02-01 - Publisher: National Academies Press
Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,
