Hermeticity Testing Of Mems And Microelectronic Packages
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Hermeticity Testing of MEMS and Microelectronic Packages
Author | : Suzanne Costello |
Publisher | : Artech House |
Total Pages | : 197 |
Release | : 2013-10-01 |
Genre | : Technology & Engineering |
ISBN | : 1608075273 |
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Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required. This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book includes up-to-date and applicable test methods for today’s package types. The authors cover the history and development of packaging, along with a view to understanding initial hermeticity testing requirements and the subsequent limitations of these methods when applied to new package types.
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