Ion Implantation Technology
Download Ion Implantation Technology full books in PDF, epub, and Kindle. Read online free Ion Implantation Technology ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Ion Implantation Science and Technology
Author | : J.F. Ziegler |
Publisher | : Elsevier |
Total Pages | : 649 |
Release | : 2012-12-02 |
Genre | : Science |
ISBN | : 0323144012 |
Download Ion Implantation Science and Technology Book in PDF, Epub and Kindle
Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.
Ion Implantation Science and Technology Related Books
Pages: 271
Pages: 649
Pages: 154
Pages: 509
Pages: 400