Ion Solid Interactions For Materials Modification And Processing Volume 396
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Ion-Solid Interactions for Materials Modification and Processing: Volume 396
Author | : D. B. Poker |
Publisher | : |
Total Pages | : 940 |
Release | : 1996-05-23 |
Genre | : Technology & Engineering |
ISBN | : |
Download Ion-Solid Interactions for Materials Modification and Processing: Volume 396 Book in PDF, Epub and Kindle
Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition. This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques. Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.
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