Micro Implantable Neural Interfaces

Neuroprostheses allow the possibility of restoring lost sensory and motor function by directly interfacing with the nervous system. The multi-electrode array serves as a key component of the neural interface system that allows the recoding from and stimulation of the nervous system. Three neural electrode systems were developed in this work (1) Three dimensional bulk micromachined electrode array (2) Silicon-SU8 neural electrode with embedded microchannels for drug and growth factor delivery (3) A flexible SU-8 neural electrode with simultaneous fluidic delivery and electrical stimulation and recording capabilities. A three dimensional electrode array that depend only MEMS processes was developed to improve on several key fabrication steps involved in the manufacturing of the current state of the art intraneural electrodes which rely heavily on non-IC processes. A silicon and SU-8 neural probe with an embedded fluidic channel is developed to deliver growth factors and drugs that would mitigate the cellular responses that have limited the chronic implementation of current multielectrode arrays. In addition to delivering drugs and growth factors, a flexible SU-8 based neural probe with fluidic and electrical capabilities was developed to further extend the longevity of neural electrodes by reducing the tissue/electrode mechanical mismatch of traditional silicon based neural electrodes.