Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Author: Saburo Nonogaki
Publisher: CRC Press
Total Pages: 336
Release: 2018-10-08
Genre: Technology & Engineering
ISBN: 1482273764
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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."


Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
Language: en
Pages: 336

Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Authors: Saburo Nonogaki
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-08 - Publisher: CRC Press

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"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. C
Microlithography Fundamentals In Semiconductor Devices And Fabrication Technology
Language: it
Pages: 0

Microlithography Fundamentals In Semiconductor Devices And Fabrication Technology

Authors: S. Nonogaki
Categories:
Type: BOOK - Published: 1998 - Publisher:

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Lithography
Language: en
Pages: 284

Lithography

Authors: Theodore C. Hennessy
Categories: Technology & Engineering
Type: BOOK - Published: 2011-01-01 - Publisher: Nova Science Pub Incorporated

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Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nonfabrication technologies and manufacturi
Direct-Write Technologies for Rapid Prototyping Applications
Language: en
Pages: 754

Direct-Write Technologies for Rapid Prototyping Applications

Authors: Alberto Pique
Categories: Technology & Engineering
Type: BOOK - Published: 2001-11-20 - Publisher: Elsevier

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Direct-Write Technologies covers applications, materials, and the techniques in using direct-write technologies. This book provides an overview of the different
Integrated Circuit Fabrication
Language: en
Pages: 353

Integrated Circuit Fabrication

Authors: Shubham Kumar
Categories: Technology & Engineering
Type: BOOK - Published: 2021-04-28 - Publisher: CRC Press

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This book covers theoretical and practical aspects of all major steps in the fabrication sequence. This book can be used conveniently in a semester length cours