Optical and EUV Lithography

Optical and EUV Lithography
Author: Andreas Erdmann
Publisher:
Total Pages:
Release: 2021-02
Genre:
ISBN: 9781510639010

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Optical and EUV Lithography
Language: en
Pages:
Authors: Andreas Erdmann
Categories:
Type: BOOK - Published: 2021-02 - Publisher:

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EUV Lithography
Language: ru
Pages: 704
Authors: Vivek Bakshi
Categories: Art
Type: BOOK - Published: 2009 - Publisher: SPIE Press

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Editorial Review Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This b
Fundamental Principles of Optical Lithography
Language: en
Pages: 503
Authors: Chris Mack
Categories: Technology & Engineering
Type: BOOK - Published: 2011-08-10 - Publisher: John Wiley & Sons

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The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p
Optical and Euv Lithography
Language: en
Pages:
Authors: Andreas Erdmann
Categories:
Type: BOOK - Published: 2021-02 - Publisher:

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EUV Sources for Lithography
Language: en
Pages: 1104
Authors: Vivek Bakshi
Categories: Art
Type: BOOK - Published: 2006 - Publisher: SPIE Press

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This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume conta