Plasma Processing of Materials

Plasma Processing of Materials
Author: National Research Council
Publisher: National Academies Press
Total Pages: 88
Release: 1991-02-01
Genre: Technology & Engineering
ISBN: 0309045975

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Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.


Plasma Processing of Materials
Language: en
Pages: 88
Authors: National Research Council
Categories: Technology & Engineering
Type: BOOK - Published: 1991-02-01 - Publisher: National Academies Press

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Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive,
Lecture Notes on Principles of Plasma Processing
Language: en
Pages: 213
Authors: Francis F. Chen
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are exper
Plasma-Surface Interactions and Processing of Materials
Language: en
Pages: 548
Authors: O. Auciello
Categories: Science
Type: BOOK - Published: 2012-12-06 - Publisher: Springer Science & Business Media

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An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution
Plasma Processing of Nanomaterials
Language: en
Pages: 417
Authors: R. Mohan Sankaran
Categories: Science
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press

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We are at a critical evolutionary juncture in the research and development of low-temperature plasmas, which have become essential to synthesizing and processin
Handbook of Advanced Plasma Processing Techniques
Language: en
Pages: 664
Authors: R.J. Shul
Categories: Technology & Engineering
Type: BOOK - Published: 2011-06-28 - Publisher: Springer Science & Business Media

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Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication.