Semiconductor Lithography
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Semiconductor lithography is one of the key steps in the manufacturing of integrated silicon-based circuits. In fabricating a semiconductor device such as a tra
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The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these p
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This Field Guide distills the material written by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the Universit
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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithograph
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