Ultraclean Technology Handbook
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Ultra-Clean Technology Handbook
Author | : Ohmi |
Publisher | : Routledge |
Total Pages | : 948 |
Release | : 2017-11-01 |
Genre | : Science |
ISBN | : 1351406426 |
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Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int
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Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor ap