X-Ray Metrology in Semiconductor Manufacturing
Language: en
Pages: 296
Authors: D. Keith Bowen
Categories: Technology & Engineering
Type: BOOK - Published: 2018-10-03 - Publisher: CRC Press

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The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials
Handbook of Silicon Semiconductor Metrology
Language: en
Pages: 703
Authors: Alain C. Diebold
Categories: Technology & Engineering
Type: BOOK - Published: 2001-06-29 - Publisher: CRC Press

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Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-l
Handbook of Critical Dimension Metrology and Process Control
Language: en
Pages: 376
Authors: Kevin M. Monahan
Categories: Electronic industries
Type: BOOK - Published: 1994 - Publisher: SPIE-International Society for Optical Engineering

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Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics
An Assessment of Critical Dimension Small Angle X-ray Scattering Metrology for Advanced Semiconductor Manufacturing
Language: en
Pages: 215
Authors: Charles M. Settens
Categories: Metal oxide semiconductor field-effect transistors
Type: BOOK - Published: 2015 - Publisher:

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Introduction to Metrology Applications in IC Manufacturing
Language: en
Pages: 187
Authors: Bo Su
Categories: Integrated circuits
Type: BOOK - Published: 2015 - Publisher:

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Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never