X Ray Scattering From Semiconductors
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X-ray Scattering from Semiconductors
Author | : Paul F. Fewster |
Publisher | : World Scientific |
Total Pages | : 303 |
Release | : 2000 |
Genre | : Science |
ISBN | : 1860941591 |
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X-ray scattering is used extensively to provide detailed structural information about materials. Semiconductors have benefited from X-ray scattering techniques as an essential feedback method for crystal growth, including compositional and thickness determination of thin layers. The methods have been developed to reveal very detailed structural information concerning material quality, interface structure, relaxation, defects, surface damage, and more.
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