Advanced Gate Stack Source Drain And Channel Engineering For Si Based Cmos
Download Advanced Gate Stack Source Drain And Channel Engineering For Si Based Cmos full books in PDF, epub, and Kindle. Read online free Advanced Gate Stack Source Drain And Channel Engineering For Si Based Cmos ebook anywhere anytime directly on your device. Fast Download speed and no annoying ads. We cannot guarantee that every ebooks is available!
Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment
Author | : P. J. Timans |
Publisher | : The Electrochemical Society |
Total Pages | : 488 |
Release | : 2008-05 |
Genre | : Gate array circuits |
ISBN | : 1566776260 |
Download Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment Book in PDF, Epub and Kindle
This issue describes processing, materials and equipment for CMOS front-end integration including gate stack, source/drain and channel engineering. Topics: strained Si/SiGe and Si/SiGe on insulator; high-mobility channels including III-V¿s, etc.; nanowires and carbon nanotubes; high-k dielectrics, metal and FUSI gate electrodes; doping/annealing for ultra-shallow junctions; low-resistivity contacts; advanced deposition (e.g. ALD, CVD, MBE), RTP, UV, plasma and laser-assisted processes.
Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-Based CMOS 4: New Materials, Processes, and Equipment Related Books
Pages: 488
Pages: 658
Pages: 426
Pages: 367
Pages: 472