Flash lamp annealing of ion implanted boron profiles

Flash lamp annealing of ion implanted boron profiles
Author: Egbert Wieser
Publisher:
Total Pages: 7
Release: 1983
Genre:
ISBN:

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Flash lamp annealing of ion implanted boron profiles
Language: en
Pages: 7
Authors: Egbert Wieser
Categories:
Type: BOOK - Published: 1983 - Publisher:

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Flash Lamp Annealing
Language: en
Pages: 288
Authors: Lars Rebohle
Categories: Technology & Engineering
Type: BOOK - Published: 2019-07-27 - Publisher: Springer

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This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduc
Ion Beams in Materials Processing and Analysis
Language: en
Pages: 425
Authors: Bernd Schmidt
Categories: Technology & Engineering
Type: BOOK - Published: 2012-12-13 - Publisher: Springer Science & Business Media

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A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of
Nanoelectronics
Language: en
Pages: 475
Authors: Joachim Knoch
Categories: Science
Type: BOOK - Published: 2020-12-07 - Publisher: Walter de Gruyter GmbH & Co KG

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The author presents all aspects, in theory and experiments, of nanoelectronic devices starting from field-effect transistors and leading to alternative device c
Ion Implantation Technology
Language: en
Pages: 582
Authors: Edmund G. Seebauer
Categories: Technology & Engineering
Type: BOOK - Published: 2008-12-11 - Publisher: American Institute of Physics

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The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encomp