Mems 2004
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Type: BOOK - Published: 2010-05-28 - Publisher: Springer Science & Business Media
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contr
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Type: BOOK - Published: 2013-03-26 - Publisher: John Wiley & Sons
This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. Here, the combination of the globally established,
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Pages: 1028
Type: BOOK - Published: 2020-04-17 - Publisher: Elsevier
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a part