Silicon On Insulator Technology And Devices 13
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Silicon-on-insulator Technology and Devices 13
| Author | : George K. Celler |
| Publisher | : The Electrochemical Society |
| Total Pages | : 409 |
| Release | : 2007 |
| Genre | : Semiconductors |
| ISBN | : 1566775531 |
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This issue of ESC Transactions covers recent significant advances in SOI technologies. It will be of interest to materials and device scientists, as well as to process and applications oriented engineers. Several keynote papers introduce and review the main topics. This is followed by contributed papers covering the latest research and implementation results.
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