The Physics Of Micro Nano Fabrication
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The Physics of Micro/Nano-Fabrication
Author | : Ivor Brodie |
Publisher | : Springer Science & Business Media |
Total Pages | : 661 |
Release | : 2013-06-29 |
Genre | : Science |
ISBN | : 1475767757 |
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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
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